1,1,3,3,3-五氟-2-(4-氧代金刚烷-1-羰基)氧基丙烷-1-磺酸盐:[4-(叔丁苯基锍鎓 (1162727- (CAS No.1162727-11-8)
- 中文别名
- 光致产酸剂；PAG；硫鎓盐光酸产生剂
- 英文名称
- (4-tert-Butylphenyl)diphenylsulfonium 1,1,3,3,3-pentafluoro-2-[(4-oxoadamantan-1-yl)carbonyl]oxypropane-1-sulfonate
- 分子式
- C36H37F5O6S2
- 所属类别
- 试剂实验设备
- 物化性质
- 白色至类白色结晶粉末，分子量约724.81。溶于PGMEA（丙二醇甲醚醋酸酯）、乳酸乙酯、丙酮等有机溶剂，微溶于水。在深紫外/极紫外光照射下产生强酸，具有良好的热稳定性，对光刻胶中的酸扩散有较好的控制能力。
- 技术参数
- 纯度≥99%
- 外观
- 白色至类白色固体粉末
- 储存条件
- 避光、密封，阴凉干燥处保存
English description（英文原文，共 1267 字符）
Product Name:(4-tert-Butylphenyl)diphenylsulfonium 1,1,3,3,3-pentafluoro-2-[(4-oxoadamantan-1-yl)carbonyl]oxypropane-1-sulfonate
English Name:(4-tert-Butylphenyl)diphenylsulfonium 1,1,3,3,3-pentafluoro-2-[(4-oxoadamantan-1-yl)carbonyl]oxypropane-1-sulfonate
CAS No.:1162727-11-8
Aliases:Photoacid generator (PAG), Sulfonium salt photoacid generator
Molecular Formula:C36H37F5O6S2
Physical Properties:White to off-white crystalline powder, molecular weight approx. 724.81. Soluble in organic solvents such as PGMEA (propylene glycol methyl ether acetate), ethyl lactate, and acetone; slightly soluble in water. Generates strong acid upon deep-UV/EUV irradiation; exhibits good thermal stability and provides good control over acid diffusion in photoresists.
Uses:Used as a photoacid generator (PAG) for chemically amplified photoresists. Upon exposure to deep-UV (DUV) and extreme-UV (EUV) radiation, it generates strong acid that catalyzes the deprotection of photoresist resins, enabling high-resolution pattern development. Suitable for fine patterning in semiconductor chip manufacturing.
Technical Specifications:
Purity: ≥99%
Appearance: white to off-white solid powder
Packaging: 100 g/bottle
Storage: keep sealed in a cool, dry place away from light
English Name:(4-tert-Butylphenyl)diphenylsulfonium 1,1,3,3,3-pentafluoro-2-[(4-oxoadamantan-1-yl)carbonyl]oxypropane-1-sulfonate
CAS No.:1162727-11-8
Aliases:Photoacid generator (PAG), Sulfonium salt photoacid generator
Molecular Formula:C36H37F5O6S2
Physical Properties:White to off-white crystalline powder, molecular weight approx. 724.81. Soluble in organic solvents such as PGMEA (propylene glycol methyl ether acetate), ethyl lactate, and acetone; slightly soluble in water. Generates strong acid upon deep-UV/EUV irradiation; exhibits good thermal stability and provides good control over acid diffusion in photoresists.
Uses:Used as a photoacid generator (PAG) for chemically amplified photoresists. Upon exposure to deep-UV (DUV) and extreme-UV (EUV) radiation, it generates strong acid that catalyzes the deprotection of photoresist resins, enabling high-resolution pattern development. Suitable for fine patterning in semiconductor chip manufacturing.
Technical Specifications:
Purity: ≥99%
Appearance: white to off-white solid powder
Packaging: 100 g/bottle
Storage: keep sealed in a cool, dry place away from light
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常见问题
- 1,1,3,3,3-五氟-2-(4-氧代金刚烷-1-羰基)氧基丙烷-1-磺酸盐:[4-(叔丁苯基锍鎓 (1162727-的 CAS 号是多少？
- 1,1,3,3,3-五氟-2-(4-氧代金刚烷-1-羰基)氧基丙烷-1-磺酸盐:[4-(叔丁苯基锍鎓 (1162727-的 CAS 号是 1162727-11-8。
- 1,1,3,3,3-五氟-2-(4-氧代金刚烷-1-羰基)氧基丙烷-1-磺酸盐:[4-(叔丁苯基锍鎓 (1162727-的分子式和分子量是什么？
- 1,1,3,3,3-五氟-2-(4-氧代金刚烷-1-羰基)氧基丙烷-1-磺酸盐:[4-(叔丁苯基锍鎓 (1162727-的分子式为 C36H37F5O6S2。
- 1,1,3,3,3-五氟-2-(4-氧代金刚烷-1-羰基)氧基丙烷-1-磺酸盐:[4-(叔丁苯基锍鎓 (1162727-的英文名称是什么？
- 1,1,3,3,3-五氟-2-(4-氧代金刚烷-1-羰基)氧基丙烷-1-磺酸盐:[4-(叔丁苯基锍鎓 (1162727-的英文名称为 (4-tert-Butylphenyl)diphenylsulfonium 1,1,3,3,3-pentafluoro-2-[(4-oxoadamantan-1-yl)carbonyl]oxypropane-1-sulfonate。
- 1,1,3,3,3-五氟-2-(4-氧代金刚烷-1-羰基)氧基丙烷-1-磺酸盐:[4-(叔丁苯基锍鎓 (1162727-还有哪些别名？
- 1,1,3,3,3-五氟-2-(4-氧代金刚烷-1-羰基)氧基丙烷-1-磺酸盐:[4-(叔丁苯基锍鎓 (1162727-又称 光致产酸剂、PAG、硫鎓盐光酸产生剂。
- 1,1,3,3,3-五氟-2-(4-氧代金刚烷-1-羰基)氧基丙烷-1-磺酸盐:[4-(叔丁苯基锍鎓 (1162727-有哪些供应商和生产厂家？
- 掌上化工当前收录 1 条1,1,3,3,3-五氟-2-(4-氧代金刚烷-1-羰基)氧基丙烷-1-磺酸盐:[4-(叔丁苯基锍鎓 (1162727-供应报价，来自 1 家供应商，可按地区、纯度、级别筛选对比。
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- 1,1,3,3,3-五氟-2-(4-氧代金刚烷-1-羰基)氧基丙烷-1-磺酸盐:[4-(叔丁苯基锍鎓 (1162727-的供应商主要分布在 上海市（1 条） 等地。
- 1,1,3,3,3-五氟-2-(4-氧代金刚烷-1-羰基)氧基丙烷-1-磺酸盐:[4-(叔丁苯基锍鎓 (1162727-有哪些级别可选？
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- 1,1,3,3,3-五氟-2-(4-氧代金刚烷-1-羰基)氧基丙烷-1-磺酸盐:[4-(叔丁苯基锍鎓 (1162727-的报价单位是什么？
- 1,1,3,3,3-五氟-2-(4-氧代金刚烷-1-羰基)氧基丙烷-1-磺酸盐:[4-(叔丁苯基锍鎓 (1162727-的报价单位主要有 千克。
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- 掌上化工1,1,3,3,3-五氟-2-(4-氧代金刚烷-1-羰基)氧基丙烷-1-磺酸盐:[4-(叔丁苯基锍鎓 (1162727-产品页汇总了各供应商的最新报价与规格，地址：/chemicals/1162727-11-8/。部分供应商价格为电议，可通过页面上的询价功能直接获取。
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