四氟化碳 (CAS No.75-73-0)
- 物化性质
- 无色无臭气体,熔点-184°C,沸点-127.8°C,液体密度约1.61 g/cm³,微溶于水,化学性质稳定,热稳定性高,不可燃。
- 技术参数
- 纯度≥99.999% 水分含量≤1 ppm 氧含量≤1 ppm 总杂质含量≤5 ppm
English description(英文原文,共 1174 字符)
Product Name:Tetrafluoromethane
English Name:Tetrafluoromethane
CAS No.:75-73-0
Aliases:Carbon tetrafluoride, CF4, Freon-14, R14
Molecular Formula:CF4
Physical Properties:Colorless, odorless gas; melting point -184°C, boiling point -127.8°C; liquid density approximately 1.61 g/cm³; slightly soluble in water; chemically stable, high thermal stability, and non-flammable.
Uses:Tetrafluoromethane is one of the most widely used plasma etching gases in the microelectronics industry, extensively employed in the etching of thin-film materials such as silicon, silicon dioxide, silicon nitride, phosphosilicate glass, and tungsten. It exhibits excellent cryogenic performance and is used as a refrigerant to provide stable low-temperature environments in superconducting magnets and cryogenic detectors. It is also utilized in surface cleaning of electronic devices, solar cell production, laser technology, gas-phase insulation, leak detection, and cleaning agents in printed circuit board manufacturing.
Technical Specifications:
Purity ≥ 99.999%
Water content ≤ 1 ppm
Oxygen content ≤ 1 ppm
Total impurities ≤ 5 ppm
Package specifications: 8L, 10L, 40L cylinders
English Name:Tetrafluoromethane
CAS No.:75-73-0
Aliases:Carbon tetrafluoride, CF4, Freon-14, R14
Molecular Formula:CF4
Physical Properties:Colorless, odorless gas; melting point -184°C, boiling point -127.8°C; liquid density approximately 1.61 g/cm³; slightly soluble in water; chemically stable, high thermal stability, and non-flammable.
Uses:Tetrafluoromethane is one of the most widely used plasma etching gases in the microelectronics industry, extensively employed in the etching of thin-film materials such as silicon, silicon dioxide, silicon nitride, phosphosilicate glass, and tungsten. It exhibits excellent cryogenic performance and is used as a refrigerant to provide stable low-temperature environments in superconducting magnets and cryogenic detectors. It is also utilized in surface cleaning of electronic devices, solar cell production, laser technology, gas-phase insulation, leak detection, and cleaning agents in printed circuit board manufacturing.
Technical Specifications:
Purity ≥ 99.999%
Water content ≤ 1 ppm
Oxygen content ≤ 1 ppm
Total impurities ≤ 5 ppm
Package specifications: 8L, 10L, 40L cylinders
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常见问题
- 四氟化碳的 CAS 号是多少?
- 四氟化碳的 CAS 号是 75-73-0。
- 四氟化碳的分子式和分子量是什么?
- 四氟化碳的分子式为 CF4。
- 四氟化碳的英文名称是什么?
- 四氟化碳的英文名称为 Tetrafluoromethane。
- 四氟化碳还有哪些别名?
- 四氟化碳又称 四氟甲烷、CF4、R14。
- 四氟化碳有哪些供应商和生产厂家?
- 掌上化工当前收录 1 条四氟化碳供应报价,来自 1 家供应商,可按地区、纯度、级别筛选对比。
- 四氟化碳的供应商主要分布在哪些地区?
- 四氟化碳的供应商主要分布在 上海市(1 条) 等地。
- 四氟化碳有哪些级别可选?
- 平台上四氟化碳的供应级别包括 工业级。
- 四氟化碳的报价单位是什么?
- 四氟化碳的报价单位主要有 千克。
- 哪里可以查到四氟化碳的价格?
- 掌上化工四氟化碳产品页汇总了各供应商的最新报价与规格,地址:/chemicals/75-73-0/。部分供应商价格为电议,可通过页面上的询价功能直接获取。
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