MCE真空气体质量流量控制器 (CAS No.None)
- 物化性质
- 工作温度-10°C至+60°C,内部压力(静态)145 psig(160 psia),耐受压力175 psig(190 psia),无需预热时间,兼容98种(MCE/MCV系列)或130种(MCES/MCVS系列)预置可选气体,支持通过COMPOSER气体编辑器自定义混合气体。
English description(英文原文,共 1021 字符)
Product Name:MCE Vacuum Gas Mass Flow Controller
English Name:MCE Vacuum Gas Mass Flow Controller
Physical Properties:Operating temperature -10°C to +60°C; internal pressure (static) 145 psig (160 psia); withstand pressure 175 psig (190 psia); no warm-up time required; compatible with 98 preset gases (MCE/MCV series) or 130 preset gases (MCES/MCVS series); supports custom mixed gases via the COMPOSER gas editor.
Uses:Used for precise measurement and control of gas mass flow in vacuum environments, widely applied in semiconductor manufacturing, analytical instruments, vacuum coating, biopharmaceutical and other industries.
Technical Specifications:
Flow range: 0-20 SLPM; minimum range 0-0.5 SCCM
Standard accuracy (NIST traceable): ±(0.8% of reading + 0.2% of full scale); high accuracy (optional): ±(0.4% of reading + 0.2% of full scale)
Turndown ratio: 200:1 (MCE/MCV) or 100:1 (MCES/MCVS)
Response time constant: 50-100ms (can be reduced to 25ms with PID enabled)
Operating temperature: -10°C to +60°C
English Name:MCE Vacuum Gas Mass Flow Controller
Physical Properties:Operating temperature -10°C to +60°C; internal pressure (static) 145 psig (160 psia); withstand pressure 175 psig (190 psia); no warm-up time required; compatible with 98 preset gases (MCE/MCV series) or 130 preset gases (MCES/MCVS series); supports custom mixed gases via the COMPOSER gas editor.
Uses:Used for precise measurement and control of gas mass flow in vacuum environments, widely applied in semiconductor manufacturing, analytical instruments, vacuum coating, biopharmaceutical and other industries.
Technical Specifications:
Flow range: 0-20 SLPM; minimum range 0-0.5 SCCM
Standard accuracy (NIST traceable): ±(0.8% of reading + 0.2% of full scale); high accuracy (optional): ±(0.4% of reading + 0.2% of full scale)
Turndown ratio: 200:1 (MCE/MCV) or 100:1 (MCES/MCVS)
Response time constant: 50-100ms (can be reduced to 25ms with PID enabled)
Operating temperature: -10°C to +60°C
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- MCE真空气体质量流量控制器的 CAS 号是多少?
- MCE真空气体质量流量控制器的 CAS 号是 None。
- MCE真空气体质量流量控制器的英文名称是什么?
- MCE真空气体质量流量控制器的英文名称为 MCE Vacuum Gas Mass Flow Controller。
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